Toward the surface preparation of InGaAs for the future CMOS integration

The integration of III-V and Ge materials on Si surface causes many issues with complexity such as lattice mismatch with silicon. In particular, the surface preparation and passivation of InGaAs is very challenging, because the formation of InGaAs/high-K interface is important, but not well understood. For the systematical study of InGaAs surface during wet processes, the effect of various wet etching processes on the surfaces of binary III-V compound semiconductors (GaAs, InAs, GaSb and InSb) was studied from the viewpoints of surface oxidation, material loss (dissolution), and passivation. Based on that, further effort to understand the surface reactions on ternary InGaAs compound semiconductor was made. In addition, process sequential effect on the InGaAs surface was investigated.


Prof. Sangwoo Lim
Prof. Sangwoo Lim, 
Department of Chemical and Biomolecular Engineering, Yonsei University (Seoul, Korea).


Sangwoo received his B.S. and M.S. degrees in Chemical Engineering from Yonsei University, Seoul, Korea. He obtained his Ph.D. in Chemical System Engineering from the University of Tokyo, Japan in 1998. He has been a post-doc researcher at Stanford University and a principal scientist at Freescale Semiconductor.

Since 2005 Sangwoo Lim is a professor at the Department of Chemical and Biomolecular Engineering, Yonsei University (Seoul, Korea). Prof. Lim’s major research interest is in various semiconductor surface preparation processes. He has authored over 150 journal and conference papers.







Industry Context for Semiconductor Wet Etch and Surface Preparation


The semiconductor industry is undergoing a transition driven by end use markets. In recent years, mobile devices have been the leading generator of growth. Now the connection of various products and machines to the internet is generating new and extensive demands for memory (storage of the data), logic (intelligent processing of the data including machine learning), and image sensing (generating visual data). Thus a division of semiconductor technology into divergent types is proceeding. Furthermore, each technology type has addressed scaling challenges with unique approaches. These lead to specific requirements for semiconductor wafer surface preparation. This paper will review the high level industry trends and how they affect surface preparation specifically.


Glenn4 square
Dr. Glenn W. Gale, Clean Track & Surface Preparation Systems Business Unit,Tokyo Electron Limited, headquarters Tokyo, Japan.

Glenn Gale received the Ph.D. degree from Clarkson University. He worked for IBM as an equipment and later process engineer, and was eventually assigned to International SEMATECH as Surface Preparation Project Manager, where he also co-chaired the ITRS Roadmap team for Surface Preparation. He later joined the semiconductor processing equipment industry in various technologist roles. Currently he is based at Tokyo Electron Limited headquarters in Tokyo, Japan, in the Clean Track & Surface Preparation Systems Business Unit. He has authored more than 50 technical papers and holds more than a dozen US and Japanese patents.  



Putting DNA nanotechnology to work: the art of DNA origami towards innovative biosensing surfaces for medical diagnostics


The ability to detect extremely low concentrations of biomolecules, such as protein biomarkers, is crucial for the prevention of early-stage detection of many diseases (e.g. cancer), and therefore indispensable for improving diagnostic tools for public health. Despite all the recent technological advantages, creating a sensitive, specific, reproducible and stable biosensor is still a hurdle. One way to overcome these issues is to fully control the nano-architecture of the biosensing surface. In this talk I will demonstrate the benefits of combining DNA origami with aptamer and DNA/MNAzyme technology to create smart biosensing surfaces with improved performance to existing diagnostic tools.

Prof. Jeroen Lammertyn, Full Professor at the Faculty of Bioscience engineering of the KULeuven and

head of the MeBioS Division of the Biosystems Department at KU Leuven. 

Jeroen Lammertyn is a Full Professor at the Faculty of Bioscience engineering of the KULeuven and head of the MeBioS Division of the Biosystems Department at KU Leuven.
His research focuses on the development of novel bio-molecular detection concepts and miniaturized analysis systems, with applications in food and medical diagnostics. He is active in the field of bio-sensing using bio-functionalized nanomaterials. Jeroen is author or co-author of over 200 peer reviewed research papers and over 100 conference papers and book chapters. He is often invited to give lectures and keynote talks and acts as reviewer for many international peer reviewed journals. Prof. Lammertyn is co-inventor of many patent applications. During his career, Jeroen was a laureate of several prestigious awards. Jeroen is involved in teaching 7 courses in the B.Sc. and M.Sc. programs of Bioscience Engineering and the Master in Nanoscience and Nanotechnology. For more information see: http://www.biosensors.be or https://lirias.kuleuven.be/cv?u=U0002118 https://lirias.kuleuven.be/cv?u=U0002118




Surface functionalization of silicon-rich materials: chemistry at the outmost nanometer.
 The covalent functionalization of silicon and silicon-rich materials allows for the tuning of surface properties to an increasing precision. The current presentation outlines recent developments in the surface functionalization of silicon and silicon-rich bulk materials, and of silicon nanoparticles. Furthermore, it will outline novel surface-sensitive analytical approaches that allow us to go ‘beyond the cartoon’ in depicting the nature of modified surfaces.    

Foto Han Zuilhof

Prof. Han Zuilhof, Wageningen University, the Netherlands

Prof Zuihof obtained his MSc in Chemistry and PhD in organic chemistry at Leiden University (The Netherlands). After postdoctoral work at the Universities of Rochester and Columbia (USA) he joined the faculty at Wageningen University.
He has written over 300 research papers, and more than 10 patents.
In 2016, he was appointed Senior Editor of Langmuir. In 2018, Han Zuilhof was elected as a "Fellow of the Royal Society of Chemistry (RSC) for his outstanding contributions to chemical science.
Prof Zuilhof is a proferssor of organic chemistry at Wageningen University (the Netherlands) since 2007. He currently, Holds the Chair of Organic Chemistry, Wageningen University, Wageningen, The Netherlands and is
A Distinguished Perennial Guest Professor of Pharmacy, Tianjin University, P.R. China.